About: http://webisa.webdatacommons.org/152931903

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this third primary embodiment, the conventional type subcarrier is eliminated entirely and a backside diaphragm or backside membrane is provided in its place to mount and support the semiconductor wafer or other substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com