About: http://webisa.webdatacommons.org/153518216

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the gas introduced to the chamber at the second protection film forming step is gas including oxygen gas; and the second protection film formed in the second protection film forming step is made of an oxide film. 6.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es