About: http://webisa.webdatacommons.org/153856879

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Areas other than the etching area are coated previously with a protective film 630 on the surface, which is removed after completion of the etching processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com