About: http://webisa.webdatacommons.org/154086112

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferred methods of the invention may include the following steps: 1) apply a photoresist composition (e.g. by spin coating) to a substrate such as a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au