About: http://webisa.webdatacommons.org/15410016

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method for fabricating dielectric antireflective coatings (DARCs) and other SiOX NY or SiNX films requiring accurate control of film thickness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com