About: http://webisa.webdatacommons.org/15419056

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The term ???feature??? includes but is not limited to metal lines and openings on a substrate, and other structures which make up the topography of the substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au