About: http://webisa.webdatacommons.org/154749236

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to a dry etching apparatus of a multi-chamber type for successively etching an object, such as a metal, a semiconductor, an insulator piece.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com