About: http://webisa.webdatacommons.org/155164261

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This method is effective particularly in the case where the resist film (light shielding patterns 3 a) on the mask PM1 has been subjected to a hardening treatment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com