About: http://webisa.webdatacommons.org/155280089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, as illustrated in FIG. 6E, a resist 13 is coated on the silicon substrate 11 in an area other than an area in which the contact electrode 10 is to be formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com