About: http://webisa.webdatacommons.org/155456995

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 1 is not limited to only Si but may be an insulator such as glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com