About: http://webisa.webdatacommons.org/15553528

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention of claim 6, wherein the movable part has a reflective surface and the MEMS device is an element of an optical cross-connect having two or more MEMS devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com