About: http://webisa.webdatacommons.org/155683022

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma is the best method because the e-beam-deposited SiO2 was very porous.
http://www.w3.org/ns/prov#wasQuotedFrom	itri2.org