About: http://webisa.webdatacommons.org/155733940

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method of depositing a germanophosphosilicate glass (GePSG) core layer for an optical waveguide structure of a planar lightwave circuit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com