About: http://webisa.webdatacommons.org/156017154

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is to be understood that other methods including chemical vapor deposition (CVD), atomic layer deposition (ALD), or spin-on processes may be utilized to deposit the active layer 106.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de