About: http://webisa.webdatacommons.org/156552070

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, as shown in FIG. 1B, the base electrode material 12a (Au/Zn) is deposited over the semiconductor GaAs substrate 6 in such a manner as to cover the surface of the resist pattern 9.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com