PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • A conductive material such as aluminum or copper may be deposited in the etched portions of the deposited lay and on an upper surface of the deposited layer, for example, by a physical vapor deposition process.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com