| http://www.w3.org/ns/prov#value | - Also, materials with lower hydrophilicity such as a fluorine-doped silicon oxide (SiOF), a carbon- and fluorine-doped silicon oxide (SiOCF), a nitrogen- and fluorine-doped silicon oxide (SiONF) or the like that contain fluorine (F) can be used as the insulation film 16.
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