About: http://webisa.webdatacommons.org/157304624

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A thin-film transistor according to claim 1, wherein said second conductive layer is formed of a metal or alloy based mainly on at least one of the materials selected from the group consisting of Ta, W, and Mo.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com