| http://www.w3.org/ns/prov#value | - As a material for the conductive film, conductive metal such as Al, Ti, as well as an alloy material thereof can be used. [0178] Then, as shown in FIG. 15B, a transparent conductive film in which 2 to 20% of zinc oxide (ZnO) is mixed with indium tin oxide (ITO) or indium oxide is formed and etched, whereby a first electrode 308 in contact with the wiring 306 and second connection terminals 307B in
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