| http://www.w3.org/ns/prov#value | - As described hereinbefore, the method according to the present invention is notably distinguished by controlling the cathode shape and temperature to form a positive column uniformly on a large area of a surface having a diameter of over 5 cm, whereby the column can be stably maintained for a long time and thus there can be deposited a high quality diamond film with a thickness of several hundred
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