About: http://webisa.webdatacommons.org/157649502

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Various deposition techniques can be used to deposit the multilayer films, such as physical vapor deposition (for example, sputtering or CVD), electro-deposition and chemical vapor deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com