About: http://webisa.webdatacommons.org/157653290

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 3a and 3 b are a cross section and plan view of a release film held in place on the working surface of the polishing pad and an apparatus for injecting the window material into the hole;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com