| http://www.w3.org/ns/prov#value | - In FIG. 20, distribution of a p-type impurity element in the first impurity semiconductor layer 105 and an n-type impurity element in the second impurity semiconductor layer 106 is denoted by a dashed line and distribution of hydrogen or halogen such as fluorine in the in wide band-gap layer 116 a is denoted by a long dashed short dashed line.
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