About: http://webisa.webdatacommons.org/157986389

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step S6 (illustrated by FIG. 4f), the contact holes are filled with conductive material such as aluminum to make electrical contact with emitter film 30, and may be planarized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com