About: http://webisa.webdatacommons.org/158014502

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In other embodiments, however, the plasma is extinguished between each step, gas flows and other parameters are adjusted in preparation for the next step and a plasma is reformed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au