About: http://webisa.webdatacommons.org/15804762

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The barrier metal film has been formed by physical vapor deposition such as sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com