About: http://webisa.webdatacommons.org/158084338

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, various methods are described for forming contacts having thicknesses less than approximately 10 ??m, and in particular embodiments, between 0.5 to 2 ??m.01-21-2010
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org