About: http://webisa.webdatacommons.org/158178352

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the membrane is porous and the fluid is a cleaning fluid that contacts the workpiece, such as a magnetic disc or semiconductor substrate for cleaning.2011-07-28
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org