About: http://webisa.webdatacommons.org/158239133

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another advantage of the present invention is that it accommodates a variety of materials including materials not amenable to bulk or surface micromachining, for example ceramics.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr