About: http://webisa.webdatacommons.org/158325348

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After forming the dielectric layer, it is exposed to a plasma including oxygen effective to reduce the dielectric constant to below what it was prior to the exposing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com