PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • metal substrate, for example a substrate made of brass, titanium, aluminium, copper, tungsten or stainless steel, by means of a thermally and electrically conductive adhesive, to form a target that can be fitted to a cathode sputtering device.
http://www.w3.org/ns/prov#wasQuotedFrom
  • patents.com