About: http://webisa.webdatacommons.org/158549703

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After deposition of the nanostructure-containing material using the self-assembly process described above, the coated substrate can be subjected to further processing, such as annealing.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com