| http://www.w3.org/ns/prov#value | - As the cutting method, another working machine such as a wire saw, a laser, or the like may be used, instead of the dicing. [0221] (Embodiment 14) [0222] Hereinafter, a fourteenth embodiment of the composite piezoelectric element according to the present invention will be described. [0223] In the piezoelectric elements 41 and 42 in the eleventh and twelfth embodiments, as shown in FIG. 27, for exa
|