About: http://webisa.webdatacommons.org/15860664

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, there is a problem that it is difficult to form a contact hole or a trench for interconnection by a damascene process because of an inferior etching characteristic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com