About: http://webisa.webdatacommons.org/158758198

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, in accordance with Embodiment 3, a fifth insulating film 709 is formed of an insulating film such as a DLC film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com