About: http://webisa.webdatacommons.org/158792744

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	That is, by the action of halogen, an impurity such as a metal becomes volatile metal chloride and is evaporated into the air, thereby being removed from the single crystal semiconductor substrate 110.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr