About: http://webisa.webdatacommons.org/15924997

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the insulating layer 7 and the interlayer dielectric film 10 are made of the same insulating material, such as BPSG, the etching conditions can easily be determined.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com