About: http://webisa.webdatacommons.org/159259822

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate is a semi-conductor wafer or glass and the coating material is typically a photoresist masking material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au