About: http://webisa.webdatacommons.org/159296122

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The desorption process included exposing the wafer to a temperature of about 700??? C. and elements including arsenic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com