| http://www.w3.org/ns/prov#value | - The radiant thermal energy helps assure that the temperature of the substrates 104 and of the thin films 392 does not decrease as the substrates 104 are moved from the bath 194 into and through the chamber 144 As noted, prior to the present invention, there was a need for apparatus and methods of efficiently drying the substrates 104.
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