About: http://webisa.webdatacommons.org/159643869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The data contains the information of designing and manufacturing, including the design size, the pattern style, the optical proximity effect, the etching bias, CMP polishing compensation, and so forth.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk