About: http://webisa.webdatacommons.org/15971534

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate electrode may have a stacked structure of NiSi, MoSi, TiSi, CoSi, or the like and polysilicon, or a stacked structure of a metal such as Al or W and polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com