About: http://webisa.webdatacommons.org/159740385

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The vapor deposition may be a vacuum vapor deposition, a physical vapor deposition such as ion plating, sputtering, etc., or a chemical vapor deposition such as thermal CVD, plasma CVD, photo-CVD, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com