| http://www.w3.org/ns/prov#value | - The layout an simulation of MEMS and interface circuits is done on a network of 10 Sun and DEC workstations, using customized layout tools (xkic and magic), electrostatic field simulators (Ansoft Maxwell), process simulators (Suprem, Sample and Simple), circuit simulators (spice3 and hspice), and MECAD tools such as PATRAN and Abacus.
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