About: http://webisa.webdatacommons.org/159846089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The liner layer may be deposited by conventional methods known to those of ordinary skill in the art such as chemical or plasma vapor deposition, ionized metal plasma, sputtering, etch sputtering, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com