About: http://webisa.webdatacommons.org/159855134

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etching of the capacitor trenches 45 may in this case take place in such a manner that the trenches 45 are widened in their lower region, i.e. in the region that is remote from the main surface 42.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com