| http://www.w3.org/ns/prov#value | - transistor, is formed by etching, and as FIG. 6(g) shows, a titanium film as a metal film 65 for a source bus wiring is deposited by sputtering, and manufactured so as to be a predetermined pattern. [0293] Note that, the metal film 65 for the source bus wiring is also not necessarily made of titanium, and hence the metal film 65 may be made of various metals such as aluminum and aluminum alloy, in
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