| http://www.w3.org/ns/prov#value | - thus optical transmission is the same, inspection tools that work at longer wavelength, e.g. 488 nm and 365 nm, where metal nitrides are more optically absorbing than their corresponding oxides, provide higher optical contrast there, an advantage for inspection and repair of patterned photomasks. [0032] While it is possible to make films with complex chemistry such as Si3N4, with ion beam deposit
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