About: http://webisa.webdatacommons.org/160221823

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At first, parameters, such as the contact angle, surface electric potential, and average surface roughness, which represent the surface state of a film formed on a wafer W are input from the keyboard of the user interface 32 (STEP 1).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com