| http://www.w3.org/ns/prov#value | - FIGS. 5A to 5C are diagrams illustrating a process of manufacturing the cantilever shown in FIG. 1, of which FIG. 5A is a diagram showing how SPM observation is conducted while performing scanning with a lever portion on a substrate on which a probe portion is placed, FIG. 5B is a diagram showing how, after the SPM observation of FIG. 5A, the lever portion is moved to a position over the probe por
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